Physical quantity sensor and electronic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9310393
APP PUB NO 20130042685A1
SERIAL NO

13569493

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Abstract

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A physical quantity sensor includes a base substrate, a movable part located on the base substrate and provided on a principal surface of the base substrate, a movable electrode part provided in the movable part, and a fixed electrode part provided on the principal surface of the base substrate and located to be opposed to a movable electrode finger, and the fixed electrode part is connected to fixed electrode wiring provided at the principal surface side of the base substrate, the movable electrode part is connected to movable electrode wiring provided at the principal surface side of the base substrate, and a shield part is provided between the fixed electrode wiring and the movable electrode wiring.

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Patent Owner(s)

Patent OwnerAddress
CRYSTAL LEAP ZRTADY ENDRE UTCA 15 UJLENGYEL 2724

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yoda, Mitsuhiro Shiojiri, JP 34 356

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