Correction for stress induced leakage current in dielectric reliability evaluations

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United States of America Patent

PATENT NO 9310418
APP PUB NO 20150061724A1
SERIAL NO

14535678

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Abstract

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Methods, apparatus, and computer program products for evaluating current transients measured during an electrical stress evaluation of a dielectric layer in a semiconductor device. Measured current transients are fit to an equation representing a time dependence for stress induced leakage currents. The measured current transients are corrected based upon stress currents computed from the equation to define corrected current transients.

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  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mittl, Steven W Essex Junction, US 15 104
Wu, Ernest Y Essex Junction, US 31 86

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