Process chamber incorporating an arrangement for injecting gaseous fluid thereinto

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United States of America Patent

PATENT NO 9316406
APP PUB NO 20130232801A1
SERIAL NO

13872880

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Abstract

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A process chamber (5) has an interior space (39). In the interior space (39), there is a receiving region (15) for workplaces (3). The process chamber (5) has an opening (12, 14) for the entry and exit of workplaces (3). The process chamber includes an arrangement (17, 19, 25, 29, 33, 37, 35) for injecting gaseous fluid into the interior space (39). The arrangement for injecting gaseous fluid has at least one nozzle (17, 19) for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the receiving region (15) for workplaces (3).

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Patent Owner(s)

Patent OwnerAddress
DUERR SYSTEMS AGCARL-BENZ-STRASSE 34 BIETIGHEIM-BISSINGEN 74321

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iglauer, Oliver Stuttgart, DE 13 103
Knuesel, Christof Munich, DE 4 59
Wieland, Dietmar Waiblingen, DE 52 348
Winkler, Marius Pleidelsheim, DE 5 78

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