Information acquiring apparatus and information acquiring method of acquiring information of sample by using terahertz wave

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United States of America Patent

PATENT NO 9316582
APP PUB NO 20140291524A1
SERIAL NO

14225038

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Abstract

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An information acquiring apparatus that acquires information of a sample includes an irradiation unit configured to irradiate an irradiation position of the sample with a terahertz wave through a transmission member being in contact with the sample; a detection unit configured to detect a terahertz wave reflected by the transmission member and a terahertz wave reflected by the sample; a waveform acquiring unit configured to acquire a time waveform of the terahertz wave reflected by the transmission member and a time waveform of the terahertz wave reflected by the sample, by using detection results of the detection unit; and an information acquiring unit configured to acquire the information of the sample by using the time waveform of the terahertz wave reflected by the transmission member, the time waveform of the terahertz wave reflected by the sample, and information relating to a thickness of the transmission member at the irradiation position.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kubota, Oichi Kawasaki, JP 11 101
Yamaguchi, Sayuri Tokyo, JP 9 24

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