Apparatus for testing electronic devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9316683
APP PUB NO 20150369858A1
SERIAL NO

14833938

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Abstract

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An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

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Patent Owner(s)

Patent OwnerAddress
AEHR TEST SYSTEMS400 KATO TERRACE FREMONT CA 94539

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burke, Paul W Hayward, US 14 296
Cao, Doan D San Jose, US 12 133
Carbone, Mark C Cupertino, US 12 133
Deboe, Kenneth W Santa Clara, US 37 212
Jovanovic, Jovan Santa Clara, US 72 612
Lindsey, Scott E Brentwood, US 64 773
Maenner, Thomas T San Ramon, US 14 203
Richmond,, II Donald P Palo Alto, US 39 373
Shepherd, Patrick M San Jose, US 14 202
Tomic, James F Oakland, US 13 155
Tyson, Jeffrey L Mountain View, US 12 133
Uher, Frank O Los Altos, US 18 304
Vu, Long V San Jose, US 13 153

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