Catalyst for decomposition of perfluorinated compound containing halogen acid gas, and preparation method thereof
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United States of America Patent
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Apr 26, 2016
Grant Date -
Nov 6, 2014
app pub date -
Aug 16, 2012
filing date -
Nov 9, 2011
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Abstract
The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.
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