Surface measurement instrument and calibration thereof

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United States of America Patent

PATENT NO 9322631
APP PUB NO 20130054194A1
SERIAL NO

13581900

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Abstract

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A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.

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Patent Owner(s)

  • TAYLOR HOBSON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Scott, Paul J Leicester, GB 3 73

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