Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
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United States of America Patent
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Apr 26, 2016
Grant Date -
Jul 23, 2015
app pub date -
Dec 10, 2014
filing date -
Jan 20, 2014
priority date (Note) -
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Abstract
According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
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