Pressure sensor, sensor array, method for manufacturing sensor array, and grasping apparatus
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United States of America Patent
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Apr 26, 2016
Grant Date -
Dec 12, 2013
app pub date -
Aug 15, 2013
filing date -
Mar 28, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion.
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