Electrode for use in measuring dielectric properties of parts

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United States of America Patent

PATENT NO 9322795
APP PUB NO 20130241581A1
SERIAL NO

13867961

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Comendant, Keith Fremont, US 49 2063
Kim, Jaehyun Fremont, US 412 3772
Liu, Qing Austin, US 478 5038
Sato, Arthur H San Jose, US 28 539
Wu, Feiyang San Francisco, US 6 13

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