Method of manufacturing a MEMS micro-mirror assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9323047
APP PUB NO 20150022872A1
SERIAL NO

14382734

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Abstract

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According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abele, Nicolas Demoret, CH 79 300
Khechana, Faouzi Preverenges, CH 27 170

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