Non-volatile memory device having a multilayer block insulating film to suppress gate leakage current
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United States of America Patent
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Apr 26, 2016
Grant Date -
Dec 24, 2015
app pub date -
Sep 11, 2014
filing date -
Jun 24, 2014
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Abstract
According to one embodiment, a non-volatile memory device includes electrodes, one semiconductor layer, conductive layers, and first and second insulating films. The electrodes are arranged side by side in a first direction. The semiconductor layer extends into the electrodes in the first direction. The conductive layers are provided between each electrode and the semiconductor layer and separated from each other in the first direction. The first insulating film extends between the conductive layers and the semiconductor layer in the first direction. The second insulating film is provided between each electrode and the conductive layers. The conductive layers become smaller in a thickness as the conductive layers are closer to an end in the first direction or a direction opposite to the first direction. The second insulating film includes a first film contacting the conductive layers, and a second film provided between each electrode and the first film.
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