Nozzle plate, liquid ejecting head, and liquid ejecting apparatus

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United States of America Patent

PATENT NO 9327500
APP PUB NO 20140183284A1
SERIAL NO

14141110

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A silicon nozzle plate has excellent liquid resistance on an inner surface of a nozzle opening and a discharge surface. A plurality of the nozzle openings are disposed in a silicon substrate of the nozzle plate. A tantalum oxide film formed by atomic layer deposition is disposed on both surfaces of the silicon substrate and the inner surface of the nozzle opening.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagatoya, Satoshi Azumino, JP 5 19
Naito, Nobuhiro Chino, JP 15 34
Nakamura, Michiya Azumino, JP 11 322
Wakamatsu, Kosuke Chino, JP 9 75

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