Micro-electro-mechanical transducer having an optimized non-flat surface

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United States of America Patent

PATENT NO 9327967
APP PUB NO 20150181348A1
SERIAL NO

14642306

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Abstract

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A capacitive micromachined ultrasound transducer (cMUT) and fabrication method of the same are provided. The cMUT has a substrate, a curved membrane disposed on top of the substrate, and a flexible membrane disposed on top of the curved membrane. The curved membrane has a raised portion which is higher than a recessed portion relative to the substrate, and is supported by a support standing on a major surface of the substrate. The flexible membrane includes a first region mounted to the raised portion of the curved membrane, and a second region extending over the recessed portion of the curved member. Methods for fabricating the cMUT are also disclosed.

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Patent Owner(s)

  • KOLO TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Yongli San Jose, US 49 3468

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