Crystallization and bleaching of diamond-like carbon and silicon oxynitride thin films
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United States of America Patent
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May 3, 2016
Grant Date -
Sep 11, 2014
app pub date -
Feb 28, 2014
filing date -
Mar 6, 2013
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Abstract
Optically transparent diamond-like carbon (DLC) thin films are formed using relatively low-temperature deposition conditions followed by a post-deposition bleaching step. The bleaching can include exposure of an as-deposited thin film to UV laser radiation, which reduces the concentration of defects in the film. The method is compatible with temperature-sensitive substrates, and can be used to form water clear DLC layers on glass substrates, for example, which can be used in display applications.
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