Dimension measuring apparatus, dimension measuring method, and program for dimension measuring apparatus
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United States of America Patent
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May 3, 2016
Grant Date -
Aug 2, 2012
app pub date -
Jan 10, 2012
filing date -
Feb 1, 2011
priority date (Note) -
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Abstract
A dimension measuring apparatus is configured of: an imaging section that photographs a workpiece on the movable stage; a depth extending section that performs depth extension on a plurality of the workpiece images in different Z-directional positions in the movable stage, to generate a depth extended image; a master image displaying section that screen-displays as a master image the depth extended image obtained by photographing a master workpiece; a measured position information generating section that designates a position to be measured and a measuring method with respect to the master image, to generate measured position information; an edge extracting section that extracts an edge of the position to be measured from the depth extended image, obtained by photographing the workpiece, based on the measured position information; and a dimension value calculating section that obtains a dimension value of the position to be measured based on the extracted edge.
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