High-precision semiconductor device probing apparatus and system thereof
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United States of America Patent
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May 3, 2016
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app pub date -
Mar 20, 2012
filing date -
Mar 20, 2012
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Abstract
A high precision semiconductor probing system includes a probe head, a circuit board positioned above the probe head, and an optical microscope, wherein the probe head has a plurality of vertical probes and at least one cantilever probe having a vertical body positioned therein. The cantilever probe is disposed close to an edge of the probe head and extends laterally out from the probe head, in order to facilitate the visual alignment viewing from top of the probing apparatus. The optical microscope is positioned on top of the probing apparatus and is configured to have a line of sight directed to the tip of the cantilever probe.
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