Heater unit, fan filter unit, and substrate processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9330948
APP PUB NO 20120325797A1
SERIAL NO

13529404

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.

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Patent Owner(s)

  • SHIBAURA MECHATRONICS CORPORATION;KABUSHIKI KAISHA TOSHIBA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuya, Masaaki Yokohama, JP 41 173
Iwami, Munenori Yokohama, JP 7 148
Kondo, Masanori Yokohama, JP 21 192
Wakatsuki, Takahiko Yokohama, JP 5 7
Yamada, Katsuya Tokyo-to, JP 45 512

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