Detection apparatus having interlayer insulating layer composed of organic material and covering layer composed of inorganic material, detection system, and method for producing detection apparatus
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United States of America Patent
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May 3, 2016
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app pub date -
Sep 30, 2013
filing date -
Oct 2, 2012
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Abstract
A detection apparatus includes a plurality of conversion elements, an interlayer insulating layer, and a covering layer. Each of the plurality of conversion elements includes an electrode electrically connected to a corresponding one of a plurality of switching elements and a semiconductor layer disposed on the electrode. The interlayer insulating layer is disposed so as to cover the plurality of switching elements and composed of an organic material, and has a surface including a first region and a second region located outside the first region. The electrodes are disposed on the surface of the interlayer insulating layer in the first region. The covering layer is disposed on the surface of the interlayer insulating layer in the second region and composed of an inorganic material.
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