Thin film piezoelectric element, thin film piezoelectric actuator, thin film piezoelectric sensor, hard drive disk, and inkjet printer device

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United States of America Patent

PATENT NO 9331262
APP PUB NO 20140339961A1
SERIAL NO

13898110

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thin film piezoelectric element according to the present invention includes a potassium sodium niobate thin film having a structure in which a plurality of crystal grains are present in a film thickness direction; and a pair of electrode films sandwiching the potassium sodium niobate thin film. When the potassium sodium niobate thin film is divided into three regions of the same thickness in the film thickness direction and average crystal grain sizes A1, A2, and A3 of the respective regions are determined, a ratio m/M of the smallest average crystal grain size m among A1, A2, and A3 to the largest average crystal grain size M among A1, A2, and A3 is 10% to 80%. The region having the smallest average crystal grain size m lies next to one of the pair of electrode films.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aida, Yasuhiro Tokyo, JP 28 137
Kurachi, Katsuyuki Tokyo, JP 20 141
Maejima, Kazuhiko Tokyo, JP 29 301
Sakuma, Hitoshi Tokyo, JP 54 270
Tanaka, Yoshitomo Tokyo, JP 38 236

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