Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device

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United States of America Patent

PATENT NO 9331606
APP PUB NO 20130214644A1
SERIAL NO

13821701

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Abstract

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A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.

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Patent Owner(s)

  • COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andreucci, Philippe Moirans, FR 19 168
Colinet, Eric Grenoble, FR 26 164
Duraffourg, Laurent Voiron, FR 35 223
Hentz, Sebastien Varces, FR 25 126
Labarthe, Sebastien Voiron, FR 3 11

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