Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same
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United States of America Patent
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May 3, 2016
Grant Date -
Oct 2, 2014
app pub date -
Mar 18, 2014
filing date -
Mar 27, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A method for manufacturing a vibrator according to the present invention includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate, and a second portion that connects the first portion and the vibrating portion and is located on the coating layer is formed.
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