Tube-shaped sputtering target

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United States of America Patent

PATENT NO 9334564
APP PUB NO 20120213917A1
SERIAL NO

13365365

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Abstract

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A tube-shaped sputtering target is provided having a carrier tube and an indium-based sputtering material arranged on the carrier tube. The sputtering material has a microstructure having a mean grain size of less than 1 mm, measured as the mean diameter of the grains on the sputtering-roughened surface of the sputtering material.

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Patent Owner(s)

Patent OwnerAddress
MATERION ADVANCED MATERIALS GERMANY GMBH63755 ALZENAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heindel, Josef Hainburg, DE 10 24
Schlott, Martin Offenbach, DE 26 97
Simons, Christoph Biebergemünd, DE 17 62
Stahr, Christoph Kahl Am Main, DE 3 19

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