MEMS component

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United States of America Patent

PATENT NO 9335203
APP PUB NO 20150059482A1
SERIAL NO

14012804

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Abstract

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A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ante, Frederik Stuttgart, DE 22 141
Curcic, Michael Stuttgart, DE 15 40
Ehrenpfordt, Ricardo Korntal-Muenchingen, DE 60 412
Graf, Juergen Stuttgart, DE 18 78
Schelling, Christoph Stuttgart, DE 108 777
Zoellin, Jochen Muellheim, DE 25 251

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