Template and pattern forming method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9335627
APP PUB NO 20110070733A1
SERIAL NO

12760282

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A template for imprinting in which a pattern is transferred onto a first substrate applied curable resin thereon, including a second substrate having a surface to be contacted with the curable resin, a concave portion provided on the surface and corresponding to a pattern to be transferred onto the first substrate, and at least one convex portion arranged in the concave portion to decrease volume of the concave portion.

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First Claim

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Shinichi Yokohama, JP 372 3485
Kikuchi, Yukiko Fujisawa, JP 17 69

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