Liquid phase laser ablation method and apparatus
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United States of America Patent
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May 17, 2016
Grant Date -
Dec 5, 2013
app pub date -
Feb 13, 2012
filing date -
Feb 21, 2011
priority date (Note) -
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Abstract
A liquid phase laser ablation apparatus is provided, which includes a vessel for storing liquid in which a component to be atomized is arranged; a laser oscillating device for oscillating a laser light irradiated to the component through the liquid; a reflecting mirror configured to freely change an angle of incidence of the laser light with respect to a surface of the liquid; a focusing lens for focusing the laser light oscillated from the laser oscillating device; a cover body for covering an upper surface of the vessel; and a laser light introduction port provided on the cover body or a side surface of the vessel above the surface of the liquid. Accordingly, liquid will not adhere to optical components constituting the apparatus, there is little contamination and damage to the optical components, and laser ablation can occur in a continuous and stable manner for a long period of time.
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