Imprint apparatus, and article manufacturing method
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United States of America Patent
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May 17, 2016
Grant Date -
Sep 19, 2013
app pub date -
Mar 15, 2013
filing date -
Mar 19, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An imprint apparatus forms a resin pattern on a substrate by curing resin in a state where the resin on the substrate is in contact with a patterned portion of a mold. It includes: a gas supply unit which supplies gas to a space between the mold and the substrate; a measuring unit which is configured so that measuring light transits the space or a space that communicates with the space, and which measures a prescribed distance between two objects using the measuring light; and a controller which obtains information concerning the prescribed distance, and which outputs a signal representing a state of concentration of the gas in the space based on the information and a measurement result of the measuring unit in a state where the gas is supplied from the gas supply unit.
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