Charged particle beam irradiation apparatus
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United States of America Patent
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May 17, 2016
Grant Date -
Dec 4, 2014
app pub date -
Dec 25, 2012
filing date -
Jan 6, 2012
priority date (Note) -
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Abstract
The purpose of the present invention is to provide a charged particle beam irradiation apparatus of a relatively simple structure which performs cooling on a sample or a sample stage. An aspect of the present invention comprises: a charged particle source; a sample stage; and a driving mechanism that comprises a transmission mechanism which transmits a driving force to move the sample stage. The charged particle beam irradiation apparatus comprises a container capable of accommodating an ionic liquid (12), wherein the container is disposed in a vacuum chamber. When the ionic liquid (12) is accommodated in the container, at least a portion of the transmission mechanism is provided at a position submerged in the ionic liquid (12).
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