Substrate holders for uniform reactive sputtering

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9343273
APP PUB NO 20100072056A1
SERIAL NO

12238279

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A substrate holder for a substrate including a frame body having an opening for the placement of the substrate. The frame body also includes a hollow portion therein. The substrate holder may be used in a sputtering apparatus for sputtering material onto the substrate. The substrate holder is particularly advantageous in the manufacturing of magnetic recording medium.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SEAGATE TECHNOLOGY LLC47488 KATO ROAD FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nolan, Thomas Fremont, US 11 23

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 17, 2023
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 17, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00