Targets and processes for fabricating same

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United States of America Patent

PATENT NO 9345119
SERIAL NO

13839973

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about 1 μm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF REGENTS OF THE NEVADA SYSTEM OF HIGHER EDUCATION ON BEHALF OF THE UNIVERSITY OF NEVADA RENO1664 N VIRGINIA ST MAIL STOP 321 RENO NV 89557

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adams, Jesse D Reno, US 42 479
Cowan, Thomas Dresden, DE 4 56
Korgan, Grant Reno, US 9 69
Le, Galloudec Nathalie Livermore, US 4 37
Malekos, Steven Reno, US 10 68
Sentoku, Yasuhiko Reno, US 6 63

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