Interchangeable magnet pack

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9347129
APP PUB NO 20130146453A1
SERIAL NO

13316358

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field.

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Patent Owner(s)

Patent OwnerAddress
SEAGATE TECHNOLOGY LLC47488 KATO ROAD FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Foo, Toon Hai Singapore, SG 3 13

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