Optical endpoint detection system
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United States of America Patent
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May 24, 2016
Grant Date -
Nov 1, 2012
app pub date -
Apr 5, 2012
filing date -
Apr 29, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
Methods and apparatus for determining an endpoint of a process chamber cleaning process are provided. In some embodiments, a processing system having an endpoint detection system may include a process chamber having internal surfaces requiring periodic cleaning due to processes performed in the process chamber; and an endpoint detection system that includes a light detector positioned to detect light reflected off of a first internal surface of the process chamber; and a controller coupled to the light detector and configured to determine an endpoint of a cleaning process based upon the detected reflected light.
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