Laser device, and exposure device and inspection device provided with laser device
Number of patents in Portfolio can not be more than 2000
United States of America
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May 24, 2016
Issued Date -
N/A
app pub date -
Mar 5, 2013
filing date -
Mar 5, 2013
priority date (Note) -
Withdrawn
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Abstract
A laser device includes: a laser light output unit that outputs a fundamental wave laser light; a wavelength conversion unit that performs wavelength conversion of the fundamental wave laser light and outputs a converted laser light; an output detector that detects a power of the converted laser light; a power feedback circuit that controls the power of the fundamental wave laser light such that the power of the converted laser light is in constant; a phase matching adjustment configuration that adjusts a quantity of state at the wavelength conversion optical element; and a phase matching control circuit that controls an operation the phase matching adjustment configuration, wherein in a state that the power of the converted laser light is controlled in constant, the phase matching control circuit adjust the quantity of state in a predetermined range such that the power of the fundamental wave laser light is minimized.
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