Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes
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United States of America Patent
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May 31, 2016
Grant Date -
Oct 15, 2015
app pub date -
Apr 9, 2014
filing date -
Apr 9, 2014
priority date (Note) -
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Abstract
Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
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