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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SHIN-ETSU HANDOTAI CO LTD	TOKYO 100-0004
SPEEDFAM CO LTD	JAPAN'S KANAGAWA COUNTY LAI LAI CITY FOUR 2 37 AIKAWA-SHI KANAGAWA

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Enari, Akitoshi	Kanagawa, JP	1	3
Irago, Mitsutaka	Tokyo, JP	1	3
Kato, Tadahiro	Fukushima, JP	37	557

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Dec 7, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 07, 2016	US,9358655,B2   US9358655B2	GRANTED PATENT AS SECOND PUBLICATION
October 08, 2015	US,20150283664,A1   US20150283664A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9358655

Outer periphery polishing apparatus for disc-shaped workpiece

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