Apparatus and method of measuring terahertz wave

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United States of America Patent

PATENT NO 9360420
APP PUB NO 20150153274A1
SERIAL NO

14619529

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Abstract

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A time-domain waveform of a terahertz wave is measured by a method based on time-domain spectroscopy by using an optical delay unit to adjust an optical path length along which excitation light propagates thereby adjusting a difference between a time at which the excitation light arrives at a generating unit configured to generate the terahertz wave and a time at which the excitation light arrives at a detection unit configured to detect the terahertz wave. The optical delay unit is driven according to a first speed pattern to acquire a first time-domain waveform. The optical delay unit is then driven according to a second speed pattern different from the first speed pattern to acquire a second time-domain waveform. The first time-domain waveform and the second time-domain waveform are averaged.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 146-8501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itsuji, Takeaki Hiratsuka, JP 88 681

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