Resin and photoresist composition comprising the same

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United States of America Patent

PATENT NO 9360754
APP PUB NO 20120122034A1
SERIAL NO

13290618

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Abstract

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The present invention provides a resin comprising a structural unit represented by the formula (aa):

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 298 1929
Kamabuchi, Akira Osaka, JP 23 167
Kim, Hyungjoo Osaka, JP 13 66
Nishimura, Takashi Osaka, JP 253 2501
Ochiai, Mitsuyoshi Osaka, JP 14 80
Shimada, Masahiko Osaka, JP 79 445

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