Nanowire-based mechanical switching device

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United States of America Patent

PATENT NO 9362074
SERIAL NO

13996507

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Abstract

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Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.

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Patent Owner(s)

  • INTEL CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chaudhry, Anurag California, US 21 305
Kim, Raseong Hillsboro, US 28 157
Kim, Seiyon Portland, US 86 1835
Kuhn, Kelin Aloha, US 12 295
Lin, Kevin Beaverton, US 161 1796
Manipatruni, Sasikanth Hillsboro, US 348 2523
Pawashe, Chytra Beaverton, US 16 56
Rios, Rafael Portland, US 129 2855
Young, Ian A Portland, US 198 2436

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