Substrate treating apparatus with substrate reordering

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United States of America Patent

PATENT NO 9368383
APP PUB NO 20140342558A1
SERIAL NO

14447409

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Abstract

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A treating section has substrate treatment lines arranged one over the other for treating substrates while transporting the substrates substantially horizontally. An IF section transports the substrates fed from each substrate treatment line to an exposing machine provided separately from this apparatus. The substrates are transported to the exposing machine in the order in which the substrates are loaded into the treating section. The throughput of this apparatus can be improved greatly, without increasing the footprint, since the substrate treatment lines are arranged one over the other. Each substrate can be controlled easily since the order of the substrates transported to the exposing machine is in agreement with the order of the substrates loaded into the treating section.

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Patent Owner(s)

Patent OwnerAddress
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD(FORMERLY OF 88 KANKOBOKO-CHO SHIJODORI-MUROMACHI-HIGASHIIRU SHIMOGYO-KU KYOTO JAPAN) TENJINKITA-MACHI 1-1 TERANOUCHI-AGARU 4-CHOME HORIKAWA-DORI KAMIGYO-KU KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukutomi, Yoshiteru Kyoto, JP 35 726
Kawamatsu, Yasuo Kyoto, JP 20 260
Mitsuhashi, Tsuyoshi Kyoto, JP 52 716
Morinishi, Kenya Kyoto, JP 28 507
Nagashima, Hiromichi Kyoto, JP 17 226
Ogura, Hiroyuki Kyoto, JP 75 1730

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