Gyro sensor, electronic apparatus, and mobile unit
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United States of America Patent
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Jun 21, 2016
Grant Date -
Oct 31, 2013
app pub date -
Apr 2, 2013
filing date -
Apr 4, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.
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