Complementary metal-oxide silicon having silicon and silicon germanium channels

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United States of America Patent

PATENT NO 9373638
SERIAL NO

14597918

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Abstract

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A silicon germanium on insulator (SGOI) wafer having nFET and pFET regions is accessed, the SGOI wafer having a silicon germanium (SiGe) layer having a first germanium (Ge) concentration, and a first oxide layer over nFET and pFET and removing the first oxide layer over the pFET. Then, increasing the first Ge concentration in the SiGe layer in the pFET to a second Ge concentration and removing the first oxide layer over the nFET. Then, recessing the SiGe layer of the first Ge concentration in the nFET so that the SiGe layer is in plane with the SiGe layer in the pFET of the second Ge concentration. Then, growing a silicon (Si) layer over the SGOI in the nFET and a SiGe layer of a third concentration in the pFET, where the SiGe layer of a third concentration is in plane with the grown nFET Si layer.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lauer, Gen P Yorktown Heights, US 44 321
Lauer, Isaac Yorktown Heights, US 218 1825
Reznicek, Alexander Troy, US 1407 11147
Sleight, Jeffrey W Ridgefield, US 297 5083

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