Nonplanar III-N transistors with compositionally graded semiconductor channels

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United States of America Patent

PATENT NO 9373693
APP PUB NO 20150064859A1
SERIAL NO

14535240

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Abstract

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A III-N semiconductor channel is compositionally graded between a transition layer and a III-N polarization layer. In embodiments, a gate stack is deposited over sidewalls of a fin including the graded III-N semiconductor channel allowing for formation of a transport channel in the III-N semiconductor channel adjacent to at least both sidewall surfaces in response to a gate bias voltage. In embodiments, a gate stack is deposited completely around a nanowire including a III-N semiconductor channel compositionally graded to enable formation of a transport channel in the III-N semiconductor channel adjacent to both the polarization layer and the transition layer in response to a gate bias voltage.

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  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chau, Robert S Beaverton, US 514 19083
Chu-Kung, Benjamin Hillsboro, US 216 2242
Dasgupta, Sansaptak Hillsboro, US 243 1333
Gardner, Sanaz K Hillsboro, US 57 443
Radosavljevic, Marko Portland, US 466 4741
Sung, Seung Hoon Beaverton, US 181 1339
Then, Han Wui Portland, US 300 1984

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