Inkjet printhead substrate, method of manufacturing the same, and inkjet printhead
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United States of America Patent
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Jul 5, 2016
Grant Date -
Jan 14, 2016
app pub date -
Jul 8, 2015
filing date -
Jul 10, 2014
priority date (Note) -
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Abstract
An inkjet printhead substrate includes a base plate, a heat storage layer placed on the base plate, a heat-generating resistive layer which is placed on the heat storage layer and which includes an electrothermal transducing portion, a wiring layer electrically connected to the heat-generating resistive layer, and an insulating protective layer covering the heat-generating resistive layer and the wiring layer. The heat storage layer includes a porous cyclic silazane film formed by a vapor phase process.
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