Hammerhead TCP coil support for high RF power conductor etch systems
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United States of America Patent
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Jul 5, 2016
Grant Date -
Dec 18, 2014
app pub date -
Jun 21, 2013
filing date -
Jun 13, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The chamber, having a ceramic window disposed in a ceiling of the chamber is provided. Included is a ceramic support having a plurality of spokes that extend from a center region to an outer periphery, and each of the spokes include a hammerhead shape that radially expands the ceramic support in a direction that is away from an axis of a spoke. Also included is a plurality of screw holes disposed through the ceramic support. The plurality of screw holes defined to enable screws to connect to a TCP coil having an inner and outer coil. The outer coil is to be disposed under the hammerhead shape of each of the spokes, and a radial gap is defined between each of the hammerhead shapes. The radial gap defines a non-continuous ring around the outer coil. A plurality of screws are disposed through the screw holes for attaching the TCP coil.
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