Selective local metal cap layer formation for improved electromigration behavior

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United States of America Patent

PATENT NO 9385038
APP PUB NO 20150255398A1
SERIAL NO

14721410

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of forming a wiring structure for an integrated circuit device includes forming one or more copper lines within an interlevel dielectric layer (ILD); masking selected regions of the one or more copper lines; selectively plating metal cap regions over exposed regions of the one or more copper lines; and forming a conformal insulator layer over the metal cap regions and uncapped regions of the one or more copper lines.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Angyal, Matthew S Stormville, US 17 480
Bao, Junjing Cedar Grove, US 99 513
Bonilla, Griselda Fishkill, US 107 1073
Choi, Samuel S Beacon, US 48 408
Culp, James A Newburgh, US 50 779
Dyer, Thomas W Pleasant Valley, US 106 2346
Filippi, Ronald G Wappingers Falls, US 99 1178
Greco, Stephen E Lagrangeville, US 55 498
Lustig, Naftali E Croton On Hudson, US 59 1488
Simon, Andrew H Fishkill, US 104 1612

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