Semiconductor growth substrates and associated systems and methods for die singulation
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United States of America Patent
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Jul 5, 2016
Grant Date -
Jun 4, 2015
app pub date -
Feb 9, 2015
filing date -
Jan 12, 2012
priority date (Note) -
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Abstract
Semiconductor growth substrates and associated systems and methods for die singulation are disclosed. A representative method for manufacturing semiconductor devices includes forming spaced-apart structures at a dicing street located between neighboring device growth regions of a substrate material. The method can further include epitaxially growing a semiconductor material by adding a first portion of semiconductor material to the device growth regions and adding a second portion of semiconductor material to the structures. The method can still further include forming semiconductor devices at the device growth regions, and separating the semiconductor devices from each other at the dicing street by removing the spaced-apart structures and the underlying substrate material at the dicing street.
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