Method of wet cleaning aluminum chamber parts
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United States of America Patent
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Jul 12, 2016
Issued Date -
N/A
app pub date -
Sep 30, 2013
filing date -
Dec 5, 2012
priority date (Note) -
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Abstract
A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.
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