Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
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United States of America Patent
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Jul 12, 2016
Grant Date -
Apr 3, 2014
app pub date -
Sep 19, 2013
filing date -
Sep 28, 2012
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Abstract
An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
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