Variable-wavelength interference filter, optical filter device, optical module and electronic apparatus
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United States of America Patent
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Jul 12, 2016
Grant Date -
Nov 21, 2013
app pub date -
May 7, 2013
filing date -
May 18, 2012
priority date (Note) -
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Abstract
A variable-wavelength interference filter includes: a first substrate; a second substrate facing the first substrate; a first reflection layer provided on a surface facing the second substrate, of the first substrate; a second reflection layer which is provided on a surface facing the first substrate, of the second substrate, and faces the first reflection layer via an inter-layer gap; and an electrostatic actuator which flexes the second substrate in a direction toward the first substrate and thus changes the inter-layer gap. The first reflection layer and the second reflection layer have a reflectance characteristic showing a higher reflectance to light with a second wavelength that is shorter than a first wavelength, than a reflectance to light with the first wavelength.
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