Vibration suppression apparatus and vibration suppression method
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United States of America Patent
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Jul 19, 2016
Grant Date -
Sep 19, 2013
app pub date -
Feb 26, 2013
filing date -
Mar 14, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention provides a vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, and a driving unit configured to drive the first object, and which suppresses a vibration of the second object, comprising a first generation unit configured to generate a first signal, a second generation unit configured to generate a second signal, and a control unit configured to control the driving unit, wherein the control unit controls the driving unit based on the first signal, and after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, the control unit controls the driving unit based on the first signal and the second signal.
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